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1 Ergebnisse
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Progress in EUV Underlayer Materials:
Yao, Huirong
;
Mullen, Salem
;
Bogusz, Zachary
..
Journal of Photopolymer Science and Technology. 25 (2012) 5 - p. 647-653 , 2012
Link:
https://doi.org/10.2494/photopolymer.25.647
RT Journal T1 <Title>Progress in EUV Underlayer Materials</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.25.647&Exemplar=1&LAN=DE A1 Yao, Huirong A1 Mullen, Salem A1 Bogusz, Zachary A1 Cho, Joon Yeon A1 Padmanaban, Murirathna PB Technical Association of Photopolymers, Japan YR 2012 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 25 IS 5 SP 647 OP 653 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.25.647 DO https://doi.org/10.2494/photopolymer.25.647 SF ELIB - SuUB Bremen
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