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Process Evaluation of Directed Self-assembly Lithography us..:
Kodera, Katsuyoshi
;
Kanai, Hideki
;
Sato, Hironobu
...
Journal of Photopolymer Science and Technology. 27 (2014) 1 - p. 31-36 , 2014
Link:
https://doi.org/10.2494/photopolymer.27.31
RT Journal T1 <Title>Process Evaluation of Directed Self-assembly Lithography using Simulation Method based on Self-consistent Field Theory</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.27.31&Exemplar=1&LAN=DE A1 Kodera, Katsuyoshi A1 Kanai, Hideki A1 Sato, Hironobu A1 Kihara, Naoko A1 Kasahara, Yusuke A1 Kobayashi, Katsutoshi A1 Miyagi, Ken A1 Minegishi, Shinya A1 Tobana, Toshikatsu A1 Fujiwara, Tomoharu A1 Hirayanagi, Noriyuki A1 Kawamonzen, Yoshiaki A1 Azuma, Tsukasa PB Technical Association of Photopolymers, Japan YR 2014 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 27 IS 1 SP 31 OP 36 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.27.31 DO https://doi.org/10.2494/photopolymer.27.31 SF ELIB - SuUB Bremen
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