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1 Ergebnisse
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EUV Research Activity at SEMATECH:
Neisser, Mark
;
Jen, Shih-Hui
;
Chun, Jun Sung
...
Journal of Photopolymer Science and Technology. 27 (2014) 5 - p. 595-600 , 2014
Link:
https://doi.org/10.2494/photopolymer.27.595
RT Journal T1 <Title>EUV Research Activity at SEMATECH</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.27.595&Exemplar=1&LAN=DE A1 Neisser, Mark A1 Jen, Shih-Hui A1 Chun, Jun Sung A1 Antohe, Alin A1 He, Long A1 Kearney, Patrick A1 Goodwin, Frank PB Technical Association of Photopolymers, Japan YR 2014 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 27 IS 5 SP 595 OP 600 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.27.595 DO https://doi.org/10.2494/photopolymer.27.595 SF ELIB - SuUB Bremen
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