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Inhomogeneity of PAGs in Resist Film studied by Molecular D..:
Toriumi, Minoru
;
Itani, Toshiro
Journal of Photopolymer Science and Technology. 27 (2014) 5 - p. 617-622 , 2014
Link:
https://doi.org/10.2494/photopolymer.27.617
RT Journal T1 <Title>Inhomogeneity of PAGs in Resist Film studied by Molecular Dynamics Simulations</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.27.617&Exemplar=1&LAN=DE A1 Toriumi, Minoru A1 Itani, Toshiro PB Technical Association of Photopolymers, Japan YR 2014 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 27 IS 5 SP 617 OP 622 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.27.617 DO https://doi.org/10.2494/photopolymer.27.617 SF ELIB - SuUB Bremen
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