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A Simulation Study on Defectivity in Directed Self-assembly..:
Kodera, Katsuyoshi
;
Kanai, Hideki
;
Sato, Hironobu
...
Journal of Photopolymer Science and Technology. 28 (2015) 5 - p. 683-688 , 2015
Link:
https://doi.org/10.2494/photopolymer.28.683
RT Journal T1 <Title>A Simulation Study on Defectivity in Directed Self-assembly Lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.28.683&Exemplar=1&LAN=DE A1 Kodera, Katsuyoshi A1 Kanai, Hideki A1 Sato, Hironobu A1 Seino, Yuriko A1 Kobayashi, Katsutoshi A1 Kasahara, Yusuke A1 Kubota, Hitoshi A1 Kihara, Naoko A1 Kawamonzen, Yoshiaki A1 Minegishi, Shinya A1 Miyagi, Ken A1 Shiraishi, Masayuki A1 Tobana, Toshikatsu A1 Nomura, Satoshi A1 Azuma, Tsukasa PB Technical Association of Photopolymers, Japan YR 2015 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 28 IS 5 SP 683 OP 688 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.28.683 DO https://doi.org/10.2494/photopolymer.28.683 SF ELIB - SuUB Bremen
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