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Sequential Infiltration Synthesis for Line Edge Roughness M..:
Baryshnikova, Marina
;
De Simone, Danilo
;
Knaepen, Werner
...
Journal of Photopolymer Science and Technology. 30 (2017) 6 - p. 667-670 , 2017
Link:
https://doi.org/10.2494/photopolymer.30.667
RT Journal T1
Sequential Infiltration Synthesis for Line Edge Roughness Mitigation of EUV Resist
UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.30.667&Exemplar=1&LAN=DE A1 Baryshnikova, Marina A1 De Simone, Danilo A1 Knaepen, Werner A1 Kachel, Krzysztof A1 Chan, BT A1 Paolillo, Sara A1 Willem Maes, Jan A1 De Roest, David A1 Rincon Delgadillo, Paulina A1 Vandenberghe, Geert PB Technical Association of Photopolymers, Japan YR 2017 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 30 IS 6 SP 667 OP 670 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.30.667 DO https://doi.org/10.2494/photopolymer.30.667 SF ELIB - SuUB Bremen
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