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1 Ergebnisse
1
Photoreactions of Tin Oxo Cages, Model EUV Photoresists:
Haitjema, Jarich
;
Zhang, Yu
;
Ottosson, Niklas
.
Journal of Photopolymer Science and Technology. 30 (2017) 1 - p. 99-102 , 2017
Link:
https://doi.org/10.2494/photopolymer.30.99
RT Journal T1 <Title>Photoreactions of Tin Oxo Cages, Model EUV Photoresists</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.30.99&Exemplar=1&LAN=DE A1 Haitjema, Jarich A1 Zhang, Yu A1 Ottosson, Niklas A1 Brouwer, Albert M. PB Technical Association of Photopolymers, Japan YR 2017 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 30 IS 1 SP 99 OP 102 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.30.99 DO https://doi.org/10.2494/photopolymer.30.99 SF ELIB - SuUB Bremen
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