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1 Ergebnisse
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Role of Metal Sensitizers for Sensitivity Improvement in EU..:
Yamamoto, Hiroki
;
Vesters, Yannick
;
Jiang, Jing
...
Journal of Photopolymer Science and Technology. 31 (2018) 6 - p. 747-751 , 2018
Link:
https://doi.org/10.2494/photopolymer.31.747
RT Journal T1 <Title>Role of Metal Sensitizers for Sensitivity Improvement in EUV Chemically Amplified Resist</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.31.747&Exemplar=1&LAN=DE A1 Yamamoto, Hiroki A1 Vesters, Yannick A1 Jiang, Jing A1 Simone, Danilo De A1 Vandenberghe, Geert A1 Kozawa, Takahiro PB Technical Association of Photopolymers, Japan YR 2018 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 31 IS 6 SP 747 OP 751 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.31.747 DO https://doi.org/10.2494/photopolymer.31.747 SF ELIB - SuUB Bremen
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