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1 Ergebnisse
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Metal Based Materials for EUV Lithography:
Kosma, Vasiliki
;
Simone, Danilo De
;
Vandenberghe, Geert
Journal of Photopolymer Science and Technology. 32 (2019) 1 - p. 179-183 , 2019
Link:
https://doi.org/10.2494/photopolymer.32.179
RT Journal T1 <Title>Metal Based Materials for EUV Lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.32.179&Exemplar=1&LAN=DE A1 Kosma, Vasiliki A1 Simone, Danilo De A1 Vandenberghe, Geert PB Technical Association of Photopolymers, Japan YR 2019 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 32 IS 1 SP 179 OP 183 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.32.179 DO https://doi.org/10.2494/photopolymer.32.179 SF ELIB - SuUB Bremen
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