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1 Ergebnisse
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Sensitizer for EUV Chemically Amplified Resist: Metal versu..:
Jiang, Jing
;
Giordano, Gaetano
;
Fallica, Roberto
..
Journal of Photopolymer Science and Technology. 32 (2019) 1 - p. 21-25 , 2019
Link:
https://doi.org/10.2494/photopolymer.32.21
RT Journal T1 <Title>Sensitizer for EUV Chemically Amplified Resist: Metal versus Halogen</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.32.21&Exemplar=1&LAN=DE A1 Jiang, Jing A1 Giordano, Gaetano A1 Fallica, Roberto A1 DeSimone, Danilo A1 Vandenberghe, Geert PB Technical Association of Photopolymers, Japan YR 2019 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 32 IS 1 SP 21 OP 25 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.32.21 DO https://doi.org/10.2494/photopolymer.32.21 SF ELIB - SuUB Bremen
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