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Study on Irradiation Effects by Femtosecond-pulsed Extreme ..:
Hosaka, Yuji
;
Yamamoto, Hiroki
;
Ishino, Masahiko
...
Journal of Photopolymer Science and Technology. 34 (2021) 1 - p. 95-98 , 2021
Link:
https://doi.org/10.2494/photopolymer.34.95
RT Journal T1 <Title>Study on Irradiation Effects by Femtosecond-pulsed Extreme Ultraviolet in Resist Materials</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.34.95&Exemplar=1&LAN=DE A1 Hosaka, Yuji A1 Yamamoto, Hiroki A1 Ishino, Masahiko A1 Dinh, Thanh-Hung A1 Nishikino, Masaharu A1 Kon, Akira A1 Owada, Shigeki A1 Inubushi, Yuichi A1 Kubota, Yuya A1 Maekawa, Yasunari PB Technical Association of Photopolymers, Japan YR 2021 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 34 IS 1 SP 95 OP 98 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.34.95 DO https://doi.org/10.2494/photopolymer.34.95 SF ELIB - SuUB Bremen
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