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1 Ergebnisse
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Spatial Distribution Imaging of Resist Thin Film with Micro..:
Iguchi, Shuhei
;
Harada, Tetsuo
;
Yamakawa, Shinji
..
Journal of Photopolymer Science and Technology. 36 (2023) 1 - p. 25-30 , 2023
Link:
https://doi.org/10.2494/photopolymer.36.25
RT Journal T1 <Title>Spatial Distribution Imaging of Resist Thin Film with Micrometer Resolution using Reflection Type Soft X-ray Projection Microscope</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.2494_photopolymer.36.25&Exemplar=1&LAN=DE A1 Iguchi, Shuhei A1 Harada, Tetsuo A1 Yamakawa, Shinji A1 Watanabe, Takeo A1 Motokawa, Takeharu PB Technical Association of Photopolymers, Japan YR 2023 SN 0914-9244 SN 1349-6336 JF Journal of Photopolymer Science and Technology VO 36 IS 1 SP 25 OP 30 LK http://dx.doi.org/https://doi.org/10.2494/photopolymer.36.25 DO https://doi.org/10.2494/photopolymer.36.25 SF ELIB - SuUB Bremen
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