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Improved Sensitivity of MEMS-based Piezoresistive Pressure ..:
Das, Kakali
;
Dutta, Himadri S.
Journal of Integrated Circuits and Systems. 19 (2024) 1 - p. 1-8 , 2024
Link:
https://doi.org/10.29292/jics.v19i1.755
RT Journal T1 <Title>Improved Sensitivity of MEMS-based Piezoresistive Pressure Sensor using Silicon Nitride Diaphragm</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.29292_jics.v19i1.755&Exemplar=1&LAN=DE A1 Das, Kakali A1 Dutta, Himadri S. PB Journal of Integrated Circuits and Systems YR 2024 SN 1872-0234 SN 1807-1953 JF Journal of Integrated Circuits and Systems VO 19 IS 1 SP 1 OP 8 LK http://dx.doi.org/https://doi.org/10.29292/jics.v19i1.755 DO https://doi.org/10.29292/jics.v19i1.755 SF ELIB - SuUB Bremen
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