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A Diamond Diffraction Grating Formed via Ion Implantation:

Stepanov, A. L. ; Nuzhdin, V. I. ; Galyautdinov, M. F....
Bulletin of the Russian Academy of Sciences: Physics.  82 (2018)  8 - p. 1047-1051 , 2018
Link: https://doi.org/10.3103/s1062873818080403