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1 Ergebnisse
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Ellipsometric Method of Substrate Temperature Measurement i..:
Shvets, V. A.
;
Azarov, I. A.
;
Rykhlitskii, S. V.
.
Optoelectronics, Instrumentation and Data Processing. 55 (2019) 1 - p. 8-15 , 2019
Link:
https://doi.org/10.3103/s8756699019010023
RT Journal T1 <Title>Ellipsometric Method of Substrate Temperature Measurement in Low-Temperature Processes of Epitaxy of InSb Layers</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3103_s8756699019010023&Exemplar=1&LAN=DE A1 Shvets, V. A. A1 Azarov, I. A. A1 Rykhlitskii, S. V. A1 Toropov, A. I. PB Allerton Press YR 2019 SN 8756-6990 SN 1934-7944 JF Optoelectronics, Instrumentation and Data Processing VO 55 IS 1 SP 8 OP 15 LK http://dx.doi.org/https://doi.org/10.3103/s8756699019010023 DO https://doi.org/10.3103/s8756699019010023 SF ELIB - SuUB Bremen
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