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1 Ergebnisse
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Silicon Nitride and Carbonitride Films for Waveguide Struct..:
Semenova, O. I.
;
Kosinova, M. L.
;
Li, Zhi-Yong
..
Optoelectronics, Instrumentation and Data Processing. 55 (2019) 5 - p. 462-467 , 2019
Link:
https://doi.org/10.3103/s8756699019050078
RT Journal T1 <Title>Silicon Nitride and Carbonitride Films for Waveguide Structures Based on Strained Silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3103_s8756699019050078&Exemplar=1&LAN=DE A1 Semenova, O. I. A1 Kosinova, M. L. A1 Li, Zhi-Yong A1 Nemkova, A. A. A1 Yu, Yu-de PB Allerton Press YR 2019 SN 8756-6990 SN 1934-7944 JF Optoelectronics, Instrumentation and Data Processing VO 55 IS 5 SP 462 OP 467 LK http://dx.doi.org/https://doi.org/10.3103/s8756699019050078 DO https://doi.org/10.3103/s8756699019050078 SF ELIB - SuUB Bremen
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