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1 Ergebnisse
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Etching Kinetics of Si(111) Surface by Selenium Molecular B..:
Ponomarev, S. A.
;
Rogilo, D. I.
;
Petrov, A. S.
..
Optoelectronics, Instrumentation and Data Processing. 56 (2020) 5 - p. 449-455 , 2020
Link:
https://doi.org/10.3103/s8756699020050088
RT Journal T1 <Title>Etching Kinetics of Si(111) Surface by Selenium Molecular Beam</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3103_s8756699020050088&Exemplar=1&LAN=DE A1 Ponomarev, S. A. A1 Rogilo, D. I. A1 Petrov, A. S. A1 Sheglov, D. V. A1 Latyshev, A. V. PB Allerton Press YR 2020 SN 8756-6990 SN 1934-7944 JF Optoelectronics, Instrumentation and Data Processing VO 56 IS 5 SP 449 OP 455 LK http://dx.doi.org/https://doi.org/10.3103/s8756699020050088 DO https://doi.org/10.3103/s8756699020050088 SF ELIB - SuUB Bremen
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