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1 Ergebnisse
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Optimization of Ion Beam-Assisted Deposition Process for Y2..:
Oh, Choluk
;
Kwon, Ojun
;
Bae, Younghun
...
Korean Journal of Metals and Materials. 62 (2024) 5 - p. 340-350 , 2024
Link:
https://doi.org/10.3365/kjmm.2024.62.5.340
RT Journal T1 <Title>Optimization of Ion Beam-Assisted Deposition Process for Y2O3 Film to Enhance Plasma Resistance</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3365_kjmm.2024.62.5.340&Exemplar=1&LAN=DE A1 Oh, Choluk A1 Kwon, Ojun A1 Bae, Younghun A1 Shin, Hyejin A1 Kwon, Young Min A1 Cho, Byungjin PB The Korean Institute of Metals and Materials YR 2024 SN 1738-8228 SN 2288-8241 JF Korean Journal of Metals and Materials VO 62 IS 5 SP 340 OP 350 LK http://dx.doi.org/https://doi.org/10.3365/kjmm.2024.62.5.340 DO https://doi.org/10.3365/kjmm.2024.62.5.340 SF ELIB - SuUB Bremen
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