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1 Ergebnisse
1
Application of an Electrical Low Pressure Impactor (ELPI) f..:
Lee, Seungjae
;
Kim, Dongbin
;
Cho, Yujin
...
Applied Sciences. 11 (2021) 16 - p. 7680 , 2021
Link:
https://doi.org/10.3390/app11167680
RT Journal T1
Application of an Electrical Low Pressure Impactor (ELPI) for Residual Particle Measurement in an Epitaxial Growth Reactor
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_app11167680&Exemplar=1&LAN=DE A1 Lee, Seungjae A1 Kim, Dongbin A1 Cho, Yujin A1 Kim, Eunmi A1 Liu, Pengzhan A1 Kwak, Dong-Bin A1 Keum, Seungho A1 Lim, Hongkang A1 Kim, Taesung PB MDPI AG YR 2021 SN 2076-3417 JF Applied Sciences VO 11 IS 16 SP 7680 LK http://dx.doi.org/https://doi.org/10.3390/app11167680 DO https://doi.org/10.3390/app11167680 SF ELIB - SuUB Bremen
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