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Controlling of Chemical Bonding Structure, Wettability, Opt..:
Ermakova, Evgeniya
;
Kolodin, Alexey
;
Fedorenko, Anastasiya
...
Coatings. 13 (2023) 2 - p. 310 , 2023
Link:
https://doi.org/10.3390/coatings13020310
RT Journal T1
Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_coatings13020310&Exemplar=1&LAN=DE A1 Ermakova, Evgeniya A1 Kolodin, Alexey A1 Fedorenko, Anastasiya A1 Yushina, Irina A1 Shayapov, Vladimir A1 Maksimovskiy, Eugene A1 Kosinova, Marina PB MDPI AG YR 2023 SN 2079-6412 JF Coatings VO 13 IS 2 SP 310 LK http://dx.doi.org/https://doi.org/10.3390/coatings13020310 DO https://doi.org/10.3390/coatings13020310 SF ELIB - SuUB Bremen
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