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1 Ergebnisse
1
Study of Birefringence and Stress Distribution of SiO2 Film..:
Sun, Qingyu
;
Sun, DeGui
;
Shang, Hongpeng
...
Coatings. 9 (2019) 5 - p. 316 , 2019
Link:
https://doi.org/10.3390/coatings9050316
RT Journal T1 <Title>Study of Birefringence and Stress Distribution of SiO2 Film Optical Waveguide on Silicon Wafer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_coatings9050316&Exemplar=1&LAN=DE A1 Sun, Qingyu A1 Sun, DeGui A1 Shang, Hongpeng A1 Yu, Ting A1 Chang, Liyuan A1 Sun, Zheyu A1 Xing, Wenchao A1 Dong, Mingxue PB MDPI AG YR 2019 SN 2079-6412 JF Coatings VO 9 IS 5 SP 316 LK http://dx.doi.org/https://doi.org/10.3390/coatings9050316 DO https://doi.org/10.3390/coatings9050316 SF ELIB - SuUB Bremen
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