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1 Ergebnisse
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The Optimizing Effect of Nitrogen Flow Ratio on the Homoepi..:
Yuan, Weilong
;
Pei, Yicheng
;
Guo, Ning
...
Crystals. 13 (2023) 6 - p. 935 , 2023
Link:
https://doi.org/10.3390/cryst13060935
RT Journal T1
The Optimizing Effect of Nitrogen Flow Ratio on the Homoepitaxial Growth of 4H-SiC Layers
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_cryst13060935&Exemplar=1&LAN=DE A1 Yuan, Weilong A1 Pei, Yicheng A1 Guo, Ning A1 Li, Yunkai A1 Zhang, Xiuhai A1 Liu, Xingfang PB MDPI AG YR 2023 SN 2073-4352 JF Crystals VO 13 IS 6 SP 935 LK http://dx.doi.org/https://doi.org/10.3390/cryst13060935 DO https://doi.org/10.3390/cryst13060935 SF ELIB - SuUB Bremen
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