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1 Ergebnisse
1
An Asymmetric Velocity Profile for Minimizing Wafer Slippag..:
Yoon, Kwan Sik
;
Kim, Min Seok
;
Moon, Hyungpil
..
Electronics. 12 (2023) 10 - p. 2157 , 2023
Link:
https://doi.org/10.3390/electronics12102157
RT Journal T1
An Asymmetric Velocity Profile for Minimizing Wafer Slippage and Settling Time of a Wafer Transport Robot
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_electronics12102157&Exemplar=1&LAN=DE A1 Yoon, Kwan Sik A1 Kim, Min Seok A1 Moon, Hyungpil A1 Choi, Hyuok Ryeol A1 Koo, Ja Choon PB MDPI AG YR 2023 SN 2079-9292 JF Electronics VO 12 IS 10 SP 2157 LK http://dx.doi.org/https://doi.org/10.3390/electronics12102157 DO https://doi.org/10.3390/electronics12102157 SF ELIB - SuUB Bremen
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