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1 Ergebnisse
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Growth of GaN Thin Films Using Plasma Enhanced Atomic Layer..:
Jiang, Shicong
;
Wu, Wan-Yu
;
Ren, Fangbin
...
International Journal of Molecular Sciences. 23 (2022) 24 - p. 16204 , 2022
Link:
https://doi.org/10.3390/ijms232416204
RT Journal T1 <Title>Growth of GaN Thin Films Using Plasma Enhanced Atomic Layer Deposition: Effect of Ammonia-Containing Plasma Power on Residual Oxygen Capture</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_ijms232416204&Exemplar=1&LAN=DE A1 Jiang, Shicong A1 Wu, Wan-Yu A1 Ren, Fangbin A1 Hsu, Chia-Hsun A1 Zhang, Xiaoying A1 Gao, Peng A1 Wuu, Dong-Sing A1 Huang, Chien-Jung A1 Lien, Shui-Yang A1 Zhu, Wenzhang PB MDPI AG YR 2022 SN 1422-0067 JF International Journal of Molecular Sciences VO 23 IS 24 SP 16204 LK http://dx.doi.org/https://doi.org/10.3390/ijms232416204 DO https://doi.org/10.3390/ijms232416204 SF ELIB - SuUB Bremen
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