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Integration of Electrodeposited Ni-Fe in MEMS with Low-Temp..:
Schiavone, Giuseppe
;
Murray, Jeremy
;
Perry, Richard
...
Materials. 10 (2017) 3 - p. 323 , 2017
Link:
https://doi.org/10.3390/ma10030323
RT Journal T1 <Title>Integration of Electrodeposited Ni-Fe in MEMS with Low-Temperature Deposition and Etch Processes</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_ma10030323&Exemplar=1&LAN=DE A1 Schiavone, Giuseppe A1 Murray, Jeremy A1 Perry, Richard A1 Mount, Andrew A1 Desmulliez, Marc A1 Walton, Anthony PB MDPI AG YR 2017 SN 1996-1944 JF Materials VO 10 IS 3 SP 323 LK http://dx.doi.org/https://doi.org/10.3390/ma10030323 DO https://doi.org/10.3390/ma10030323 SF ELIB - SuUB Bremen
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