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1 Ergebnisse
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Microstructures of HfOx Films Prepared via Atomic Layer Dep..:
Kim, Seon Yong
;
Jung, Yong Chan
;
Seong, Sejong
...
Materials. 14 (2021) 23 - p. 7478 , 2021
Link:
https://doi.org/10.3390/ma14237478
RT Journal T1
Microstructures of HfOx Films Prepared via Atomic Layer Deposition Using La(NO3)3·6H2O Oxidants
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_ma14237478&Exemplar=1&LAN=DE A1 Kim, Seon Yong A1 Jung, Yong Chan A1 Seong, Sejong A1 Lee, Taehoon A1 Park, In-Sung A1 Ahn, Jinho PB MDPI AG YR 2021 SN 1996-1944 JF Materials VO 14 IS 23 SP 7478 LK http://dx.doi.org/https://doi.org/10.3390/ma14237478 DO https://doi.org/10.3390/ma14237478 SF ELIB - SuUB Bremen
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