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1 Ergebnisse
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Change in Electrical/Mechanical Properties of Plasma Polyme..:
Baek, Namwuk
;
Park, Yoonsoo
;
Lim, Hyuna
...
Materials. 16 (2023) 13 - p. 4663 , 2023
Link:
https://doi.org/10.3390/ma16134663
RT Journal T1
Change in Electrical/Mechanical Properties of Plasma Polymerized Low Dielectric Constant Films after Etching in CF4/O2 Plasma for Semiconductor Multilevel Interconnects
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_ma16134663&Exemplar=1&LAN=DE A1 Baek, Namwuk A1 Park, Yoonsoo A1 Lim, Hyuna A1 Cha, Jihwan A1 Jang, Taesoon A1 Kang, Shinwon A1 Jang, Seonhee A1 Jung, Donggeun PB MDPI AG YR 2023 SN 1996-1944 JF Materials VO 16 IS 13 SP 4663 LK http://dx.doi.org/https://doi.org/10.3390/ma16134663 DO https://doi.org/10.3390/ma16134663 SF ELIB - SuUB Bremen
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