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1 Ergebnisse
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Enhancing the Plasma-Resistance Properties of Li2O–Al2O3–Si..:
Kim, So-Won
;
Lee, Hwan-Seok
;
Jun, Deok-Sung
...
Materials. 16 (2023) 14 - p. 5112 , 2023
Link:
https://doi.org/10.3390/ma16145112
RT Journal T1
Enhancing the Plasma-Resistance Properties of Li2O–Al2O3–SiO2 Glasses for the Semiconductor Etch Process via Alkaline Earth Oxide Incorporation
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_ma16145112&Exemplar=1&LAN=DE A1 Kim, So-Won A1 Lee, Hwan-Seok A1 Jun, Deok-Sung A1 Lee, Seong-Eui A1 Lee, Joung-Ho A1 Lee, Hee-Chul PB MDPI AG YR 2023 SN 1996-1944 JF Materials VO 16 IS 14 SP 5112 LK http://dx.doi.org/https://doi.org/10.3390/ma16145112 DO https://doi.org/10.3390/ma16145112 SF ELIB - SuUB Bremen
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