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1 Ergebnisse
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A Novel MEMS Capacitive Microphone with Semiconstrained Dia..:
Shubham, Shubham
;
Seo, Yoonho
;
Naderyan, Vahid
...
Micromachines. 13 (2021) 1 - p. 22 , 2021
Link:
https://doi.org/10.3390/mi13010022
RT Journal T1
A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_mi13010022&Exemplar=1&LAN=DE A1 Shubham, Shubham A1 Seo, Yoonho A1 Naderyan, Vahid A1 Song, Xin A1 Frank, Anthony A1 Johnson, Jeremy A1 da Silva, Mark A1 Pedersen, Michael PB MDPI AG YR 2021 SN 2072-666X JF Micromachines VO 13 IS 1 SP 22 LK http://dx.doi.org/https://doi.org/10.3390/mi13010022 DO https://doi.org/10.3390/mi13010022 SF ELIB - SuUB Bremen
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