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Demonstration of Heterogeneous Structure for Fabricating a ..:
Xue, Gaopeng
;
Toda, Masaya
;
Li, Xinghui
..
Micromachines. 13 (2022) 8 - p. 1287 , 2022
Link:
https://doi.org/10.3390/mi13081287
RT Journal T1
Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_mi13081287&Exemplar=1&LAN=DE A1 Xue, Gaopeng A1 Toda, Masaya A1 Li, Xinghui A1 Li, Bing A1 Ono, Takahito PB MDPI AG YR 2022 SN 2072-666X JF Micromachines VO 13 IS 8 SP 1287 LK http://dx.doi.org/https://doi.org/10.3390/mi13081287 DO https://doi.org/10.3390/mi13081287 SF ELIB - SuUB Bremen
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