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1 Ergebnisse
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Demonstration of Thin Film Bulk Acoustic Resonator Based on..:
Nian, Laixia
;
Zou, Yang
;
Gao, Chao
...
Micromachines. 13 (2022) 12 - p. 2044 , 2022
Link:
https://doi.org/10.3390/mi13122044
RT Journal T1
Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible Keff2
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_mi13122044&Exemplar=1&LAN=DE A1 Nian, Laixia A1 Zou, Yang A1 Gao, Chao A1 Zhou, Yu A1 Fan, Yuchen A1 Wang, Jian A1 Liu, Wenjuan A1 Liu, Yan A1 Soon, Jeffrey Bowoon A1 Cai, Yao A1 Sun, Chengliang PB MDPI AG YR 2022 SN 2072-666X JF Micromachines VO 13 IS 12 SP 2044 LK http://dx.doi.org/https://doi.org/10.3390/mi13122044 DO https://doi.org/10.3390/mi13122044 SF ELIB - SuUB Bremen
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