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1 Ergebnisse
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Stress Distribution Profile Imaging With Spectral Fabry-Per..:
Inzelberg, Adam
;
Linzon, Yoav
Micromachines. 8 (2017) 10 - p. 294 , 2017
Link:
https://doi.org/10.3390/mi8100294
RT Journal T1
Stress Distribution Profile Imaging With Spectral Fabry-Perot Interferometry in Thin Layer Substrates for Surface Micromachining
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_mi8100294&Exemplar=1&LAN=DE A1 Inzelberg, Adam A1 Linzon, Yoav PB MDPI AG YR 2017 SN 2072-666X JF Micromachines VO 8 IS 10 SP 294 LK http://dx.doi.org/https://doi.org/10.3390/mi8100294 DO https://doi.org/10.3390/mi8100294 SF ELIB - SuUB Bremen
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