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Room Temperature Deposition of Nanocrystalline SiC Thin Fil..:
Tiron, Vasile
;
Ursu, Elena-Laura
;
Cristea, Daniel
...
Nanomaterials. 12 (2022) 3 - p. 512 , 2022
Link:
https://doi.org/10.3390/nano12030512
RT Journal T1
Room Temperature Deposition of Nanocrystalline SiC Thin Films by DCMS/HiPIMS Co-Sputtering Technique
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_nano12030512&Exemplar=1&LAN=DE A1 Tiron, Vasile A1 Ursu, Elena-Laura A1 Cristea, Daniel A1 Bulai, Georgiana A1 Stoian, George A1 Matei, Teodora A1 Velicu, Ioana-Laura PB MDPI AG YR 2022 SN 2079-4991 JF Nanomaterials VO 12 IS 3 SP 512 LK http://dx.doi.org/https://doi.org/10.3390/nano12030512 DO https://doi.org/10.3390/nano12030512 SF ELIB - SuUB Bremen
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