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1 Ergebnisse
1
A Novel Si Nanosheet Channel Release Process for the Fabric..:
Sun, Xin
;
Wang, Dawei
;
Qian, Lewen
...
Nanomaterials. 13 (2023) 3 - p. 504 , 2023
Link:
https://doi.org/10.3390/nano13030504
RT Journal T1
A Novel Si Nanosheet Channel Release Process for the Fabrication of Gate-All-Around Transistors and Its Mechanism Investigation
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_nano13030504&Exemplar=1&LAN=DE A1 Sun, Xin A1 Wang, Dawei A1 Qian, Lewen A1 Liu, Tao A1 Yang, Jingwen A1 Chen, Kun A1 Wang, Luyu A1 Huang, Ziqiang A1 Xu, Min A1 Wang, Chen A1 Wu, Chunlei A1 Xu, Saisheng A1 Zhang, David Wei PB MDPI AG YR 2023 SN 2079-4991 JF Nanomaterials VO 13 IS 3 SP 504 LK http://dx.doi.org/https://doi.org/10.3390/nano13030504 DO https://doi.org/10.3390/nano13030504 SF ELIB - SuUB Bremen
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