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1 Ergebnisse
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Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroel..:
Di Palma, Valerio
;
Pianalto, Andrea
;
Perego, Michele
...
Nanomaterials. 13 (2023) 6 - p. 976 , 2023
Link:
https://doi.org/10.3390/nano13060976
RT Journal T1
Plasma-Assisted Atomic Layer Deposition of IrO2 for Neuroelectronics
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_nano13060976&Exemplar=1&LAN=DE A1 Di Palma, Valerio A1 Pianalto, Andrea A1 Perego, Michele A1 Tallarida, Graziella A1 Codegoni, Davide A1 Fanciulli, Marco PB MDPI AG YR 2023 SN 2079-4991 JF Nanomaterials VO 13 IS 6 SP 976 LK http://dx.doi.org/https://doi.org/10.3390/nano13060976 DO https://doi.org/10.3390/nano13060976 SF ELIB - SuUB Bremen
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