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1 Ergebnisse
1
Study of Selective Dry Etching Effects of 15-Cycle Si0.7Ge0..:
Liu, Enxu
;
Li, Junjie
;
Zhou, Na
...
Nanomaterials. 13 (2023) 14 - p. 2127 , 2023
Link:
https://doi.org/10.3390/nano13142127
RT Journal T1
Study of Selective Dry Etching Effects of 15-Cycle Si0.7Ge0.3/Si Multilayer Structure in Gate-All-Around Transistor Process
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_nano13142127&Exemplar=1&LAN=DE A1 Liu, Enxu A1 Li, Junjie A1 Zhou, Na A1 Chen, Rui A1 Shao, Hua A1 Gao, Jianfeng A1 Zhang, Qingzhu A1 Kong, Zhenzhen A1 Lin, Hongxiao A1 Zhang, Chenchen A1 Lai, Panpan A1 Yang, Chaoran A1 Liu, Yang A1 Wang, Guilei A1 Zhao, Chao A1 Yang, Tao A1 Yin, Huaxiang A1 Li, Junfeng A1 Luo, Jun A1 Wang, Wenwu PB MDPI AG YR 2023 SN 2079-4991 JF Nanomaterials VO 13 IS 14 SP 2127 LK http://dx.doi.org/https://doi.org/10.3390/nano13142127 DO https://doi.org/10.3390/nano13142127 SF ELIB - SuUB Bremen
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