I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Polymer Nanoparticles Applied in the CMP (Chemical Mechanic..:
Chiu, Wei-Lan
;
Huang, Ching-I
Polymers. 15 (2023) 15 - p. 3198 , 2023
Link:
https://doi.org/10.3390/polym15153198
RT Journal T1
Polymer Nanoparticles Applied in the CMP (Chemical Mechanical Polishing) Process of Chip Wafers for Defect Improvement and Polishing Removal Rate Response
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_polym15153198&Exemplar=1&LAN=DE A1 Chiu, Wei-Lan A1 Huang, Ching-I PB MDPI AG YR 2023 SN 2073-4360 JF Polymers VO 15 IS 15 SP 3198 LK http://dx.doi.org/https://doi.org/10.3390/polym15153198 DO https://doi.org/10.3390/polym15153198 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)