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1 Ergebnisse
1
Real-Time Plasma Process Condition Sensing and Abnormal Pro..:
Yang, Ryan
;
Chen, Rongshun
Sensors. 10 (2010) 6 - p. 5703-5723 , 2010
Link:
https://doi.org/10.3390/s100605703
RT Journal T1
Real-Time Plasma Process Condition Sensing and Abnormal Process Detection
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_s100605703&Exemplar=1&LAN=DE A1 Yang, Ryan A1 Chen, Rongshun PB MDPI AG YR 2010 SN 1424-8220 JF Sensors VO 10 IS 6 SP 5703 OP 5723 LK http://dx.doi.org/https://doi.org/10.3390/s100605703 DO https://doi.org/10.3390/s100605703 SF ELIB - SuUB Bremen
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