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1 Ergebnisse
1
Fabrication and Performance of a Ta2O5 Thin Film pH Sensor ..:
Guo, Yuzhen
;
Zhang, Zengxing
;
Yao, Bin
...
Sensors. 23 (2023) 13 - p. 6061 , 2023
Link:
https://doi.org/10.3390/s23136061
RT Journal T1
Fabrication and Performance of a Ta2O5 Thin Film pH Sensor Manufactured Using MEMS Processes
UL https://suche.suub.uni-bremen.de/peid=cr-10.3390_s23136061&Exemplar=1&LAN=DE A1 Guo, Yuzhen A1 Zhang, Zengxing A1 Yao, Bin A1 Chai, Jin A1 Zhang, Shiqiang A1 Liu, Jianwei A1 Zhao, Zhou A1 Xue, Chenyang PB MDPI AG YR 2023 SN 1424-8220 JF Sensors VO 23 IS 13 SP 6061 LK http://dx.doi.org/https://doi.org/10.3390/s23136061 DO https://doi.org/10.3390/s23136061 SF ELIB - SuUB Bremen
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