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1 Ergebnisse
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Time-of-flight mass spectrometric diagnostics for ionized a..:
Tsukamoto, Keizo
;
Tamura, Tetsuro
;
Matsusaki, Hiromi
...
Japanese Journal of Applied Physics. 59 (2020) SH - p. SHHB05 , 2020
Link:
https://doi.org/10.35848/1347-4065/ab71de
RT Journal T1
Time-of-flight mass spectrometric diagnostics for ionized and neutral species in high-power pulsed magnetron sputtering of titanium
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ab71de&Exemplar=1&LAN=DE A1 Tsukamoto, Keizo A1 Tamura, Tetsuro A1 Matsusaki, Hiromi A1 Tona, Masahide A1 Yamamoto, Hiroaki A1 Nakagomi, Yuki A1 Nishida, Hiroshi A1 Hirai, Yoshihiro A1 Nishimiya, Nobuo A1 Sanekata, Masaomi A1 Ohshimo, Keijiro A1 Koyasu, Kiichirou A1 Misaizu, Fuminori PB IOP Publishing YR 2020 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 59 IS SH SP SHHB05 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ab71de DO https://doi.org/10.35848/1347-4065/ab71de SF ELIB - SuUB Bremen
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