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1 Ergebnisse
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In situ monitoring of plasma ignition step in capacitively ..:
Lee, Yongil
;
Song, Wansoo
;
Hong, Sang Jeen
Japanese Journal of Applied Physics. 59 (2020) SJ - p. SJJD02 , 2020
Link:
https://doi.org/10.35848/1347-4065/ab85de
RT Journal T1
In situ monitoring of plasma ignition step in capacitively coupled plasma systems
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ab85de&Exemplar=1&LAN=DE A1 Lee, Yongil A1 Song, Wansoo A1 Hong, Sang Jeen PB IOP Publishing YR 2020 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 59 IS SJ SP SJJD02 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ab85de DO https://doi.org/10.35848/1347-4065/ab85de SF ELIB - SuUB Bremen
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