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1 Ergebnisse
1
Effect of conditioner disc wear on frictional, thermal, kin..:
Mariscal, Juan Cristobal
;
Dadashazar, Hossein
;
McAllister, Jeffrey
..
Japanese Journal of Applied Physics. 59 (2020) SL - p. SLLA02 , 2020
Link:
https://doi.org/10.35848/1347-4065/ab9353
RT Journal T1
Effect of conditioner disc wear on frictional, thermal, kinetic and pad micro-textural attributes of interlayer dielectric and tungsten chemical mechanical planarization
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ab9353&Exemplar=1&LAN=DE A1 Mariscal, Juan Cristobal A1 Dadashazar, Hossein A1 McAllister, Jeffrey A1 Sampurno, Yasa A1 Philipossian, Ara PB IOP Publishing YR 2020 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 59 IS SL SP SLLA02 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ab9353 DO https://doi.org/10.35848/1347-4065/ab9353 SF ELIB - SuUB Bremen
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