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Importance of crystallinity improvement in MoS2 film by com..:
Imai, Shinya
;
Hamada, Takuya
;
Hamada, Masaya
...
Japanese Journal of Applied Physics. 60 (2021) SB - p. SBBH10 , 2021
Link:
https://doi.org/10.35848/1347-4065/abdcae
RT Journal T1
Importance of crystallinity improvement in MoS2 film by compound sputtering even followed by post sulfurization
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_abdcae&Exemplar=1&LAN=DE A1 Imai, Shinya A1 Hamada, Takuya A1 Hamada, Masaya A1 Shirokura, Takanori A1 Muneta, Iriya A1 Kakushima, Kuniyuki A1 Tatsumi, Tetsuya A1 Tomiya, Shigetaka A1 Tsutsui, Kazuo A1 Wakabayashi, Hitoshi PB IOP Publishing YR 2021 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 60 IS SB SP SBBH10 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/abdcae DO https://doi.org/10.35848/1347-4065/abdcae SF ELIB - SuUB Bremen
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