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1 Ergebnisse
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Effect of reactive gas condition on nonpolar AlN film growt..:
Morita, Masaya
;
Ishibashi, Keiji
;
Takahashi, Kenichiro
...
Japanese Journal of Applied Physics. , 2022
Link:
https://doi.org/10.35848/1347-4065/ac4ad7
RT Journal T1
Effect of reactive gas condition on nonpolar AlN film growth on MnS/Si (100) by reactive DC sputtering
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ac4ad7&Exemplar=1&LAN=DE A1 Morita, Masaya A1 Ishibashi, Keiji A1 Takahashi, Kenichiro A1 Ueda, Shigenori A1 Chen, Jun A1 Tatejima, Kouta A1 CHIKYOW, Toyohiro A1 Ogura, Atsushi A1 NAGATA, Takahiro PB IOP Publishing YR 2022 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ac4ad7 DO https://doi.org/10.35848/1347-4065/ac4ad7 SF ELIB - SuUB Bremen
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