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1 Ergebnisse
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Deep learning model for 3D profiling of high-aspect-ratio f..:
Sun, Wei
;
Goto, Yasunori
;
Yamamoto, Takuma
.
Japanese Journal of Applied Physics. 61 (2022) SD - p. SD1036 , 2022
Link:
https://doi.org/10.35848/1347-4065/ac6306
RT Journal T1
Deep learning model for 3D profiling of high-aspect-ratio features using high-voltage CD-SEM
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ac6306&Exemplar=1&LAN=DE A1 Sun, Wei A1 Goto, Yasunori A1 Yamamoto, Takuma A1 Hitomi, Keiichiro PB IOP Publishing YR 2022 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 61 IS SD SP SD1036 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ac6306 DO https://doi.org/10.35848/1347-4065/ac6306 SF ELIB - SuUB Bremen
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