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1 Ergebnisse
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High-speed hydrophilic and ashing treatments of polyimide u..:
Suzuki, H.
;
Ogasawara, T.
;
Iwata, Y.
..
Japanese Journal of Applied Physics. 61 (2022) SI - p. SI1008 , 2022
Link:
https://doi.org/10.35848/1347-4065/ac64e2
RT Journal T1 <Title>High-speed hydrophilic and ashing treatments of polyimide using Ar/O2 atmospheric-pressure microwave line plasma</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ac64e2&Exemplar=1&LAN=DE A1 Suzuki, H. A1 Ogasawara, T. A1 Iwata, Y. A1 Bae, H. A1 Toyoda, H. PB IOP Publishing YR 2022 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 61 IS SI SP SI1008 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ac64e2 DO https://doi.org/10.35848/1347-4065/ac64e2 SF ELIB - SuUB Bremen
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