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1 Ergebnisse
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Effects of amplitude modulated capacitively coupled dischar..:
Abe, Kohei
;
Kamataki, Kunihiro
;
Yamamoto, Akihiro
...
Japanese Journal of Applied Physics. 61 (2022) 10 - p. 106003 , 2022
Link:
https://doi.org/10.35848/1347-4065/ac7626
RT Journal T1
Effects of amplitude modulated capacitively coupled discharge Ar plasma on kinetic energy and angular distribution function of ions impinging on electrodes: particle-in-cell/Monte Carlo collision model simulation
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ac7626&Exemplar=1&LAN=DE A1 Abe, Kohei A1 Kamataki, Kunihiro A1 Yamamoto, Akihiro A1 Nagao, Iori A1 Otaka, Michihiro A1 Yamashita, Daisuke A1 Okumura, Takamasa A1 Yamashita, Naoto A1 Itagaki, Naho A1 Koga, Kazunori A1 Shiratani, Masaharu PB IOP Publishing YR 2022 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 61 IS 10 SP 106003 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ac7626 DO https://doi.org/10.35848/1347-4065/ac7626 SF ELIB - SuUB Bremen
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