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1 Ergebnisse
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Chemical states of PVD-ZrS2 film underneath scaled high-k f..:
Otomo, Masaki
;
Hamada, Masaya
;
Ono, Ryo
...
Japanese Journal of Applied Physics. 62 (2023) SC - p. SC1015 , 2023
Link:
https://doi.org/10.35848/1347-4065/aca7cf
RT Journal T1
Chemical states of PVD-ZrS2 film underneath scaled high-k film with self-oxidized ZrO2 film as interfacial layer
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_aca7cf&Exemplar=1&LAN=DE A1 Otomo, Masaki A1 Hamada, Masaya A1 Ono, Ryo A1 Muneta, Iriya A1 Kakushima, Kuniyuki A1 Tsutsui, Kazuo A1 Wakabayashi, Hitoshi PB IOP Publishing YR 2023 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 62 IS SC SP SC1015 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/aca7cf DO https://doi.org/10.35848/1347-4065/aca7cf SF ELIB - SuUB Bremen
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