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1 Ergebnisse
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Impact of B2H6 plasma treatment on contact resistivity in s..:
Gotoh, Kazuhiro
;
Ozaki, Ryo
;
Morimura, Motoo
...
Japanese Journal of Applied Physics. 62 (2023) SK - p. SK1026 , 2023
Link:
https://doi.org/10.35848/1347-4065/acc953
RT Journal T1
Impact of B2H6 plasma treatment on contact resistivity in silicon heterojunction solar cells
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_acc953&Exemplar=1&LAN=DE A1 Gotoh, Kazuhiro A1 Ozaki, Ryo A1 Morimura, Motoo A1 Tanaka, Aki A1 Iseki, Yoshiko A1 Nakamura, Kyotaro A1 Muramatsu, Kazuo A1 Kurokawa, Yasuyoshi A1 Ohshita, Yoshio A1 Usami, Noritaka PB IOP Publishing YR 2023 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 62 IS SK SP SK1026 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/acc953 DO https://doi.org/10.35848/1347-4065/acc953 SF ELIB - SuUB Bremen
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