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1 Ergebnisse
1
Study on dopant activation and EOT impact in HKMG stacks us..:
Divya, Pandi
;
Chen, Shih Syun
;
Lee, Wen Hsi
.
Japanese Journal of Applied Physics. 63 (2024) 2 - p. 026502 , 2024
Link:
https://doi.org/10.35848/1347-4065/ad1e86
RT Journal T1
Study on dopant activation and EOT impact in HKMG stacks using microwave annealing with different frequencies
UL https://suche.suub.uni-bremen.de/peid=cr-10.35848_1347-4065_ad1e86&Exemplar=1&LAN=DE A1 Divya, Pandi A1 Chen, Shih Syun A1 Lee, Wen Hsi A1 Wang, Y. L. PB IOP Publishing YR 2024 SN 0021-4922 SN 1347-4065 JF Japanese Journal of Applied Physics VO 63 IS 2 SP 026502 LK http://dx.doi.org/https://doi.org/10.35848/1347-4065/ad1e86 DO https://doi.org/10.35848/1347-4065/ad1e86 SF ELIB - SuUB Bremen
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